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Ultrasonic motor - List of Manufacturers, Suppliers, Companies and Products

Ultrasonic motor Product List

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Ultrasonic Motor Standard Type Model USR30-B Series

Built-in type small ultrasonic motor

The standard model is ideal for prototyping devices using ultrasonic motors and building systems for general environments. The USR30-B series is a built-in type of small ultrasonic motor. The maximum torque is 0.1 [Nm] and the maximum rotation speed is 300 [rpm]. We offer the single-shaft type USR30-B3, which has an output shaft only, and the dual-shaft type USR30-B4, which allows for sensor mounting. For more details, please download and view the catalog.

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Ultrasonic Motor Standard Type Encoder-equipped Model USR60-E Series

Model equipped with an incremental rotary encoder.

The standard model is ideal for prototyping devices using ultrasonic motors and building systems for general environments. The USR60-E series is equipped with an incremental rotary encoder. The maximum torque is 1.0 [Nm] and the maximum rotational speed is 150 [rpm]. The encoder resolution can be selected from two options: 500 [P/R] and 1,000 [P/R]. The USR60-E3 features a 500 [P/R] encoder, while the USR60-E3T is equipped with a 1,000 [P/R] encoder. For more details, please download and view the catalog.

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Ultrasonic Motor Non-Magnetic Type Basic Model USR30-SN Series

Highly robust, with the ability to connect and disconnect cables via connectors!

The non-magnetic ultrasonic motor is designed for use in high magnetic fields such as MRI, with metal components made only from special aluminum and copper alloys. It can be safely used in environments with a magnetic flux density exceeding 3[T]. The USR30-SN series is housed in a robust case and features a non-magnetic model that allows for cable connection and disconnection via connectors. The maximum torque is 0.1[Nm], and the maximum rotational speed is 250[rpm]. We offer a single-shaft type USR30-S3N with an output shaft only, and a dual-shaft type USR30-S4N that allows for sensor mounting. For more details, please download and view the catalog.

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Ultrasonic Motor "Motor for Magnetic Field Environment"

A special motor that does not emit a magnetic field during operation, so it does not affect external devices!

We would like to introduce our ultrasonic motor, the "Magnetic Field Environment Motor." Constructed entirely from non-magnetic materials, down to the last screw, it is unaffected by magnetic field environments and does not influence them either. It can be safely used in magnetic field environments such as inside MRI machines. We offer a wide range of products, including the "Sensorless Single-Axis Motor for Magnetic Field Environments" and the "Motor with 500p/r Encoder for Magnetic Field Environments." 【Series Lineup】 ■ Magnetic Field Environment Motor (PSM60N SERIES) ■ Magnetic Field Environment Motor (PSM40N SERIES) *For more details, please refer to the PDF document or feel free to contact us.

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Hollow Ultrasonic Motor: PSM60 R Series

A hollow motor with a through hole of φ12 and a flange mounting interface.

The central through hole with a diameter of 12mm allows for the passage of cables and shafts, achieving a maximum torque of 1.2N·m, comparable to other models in the PSM60 series! The external interface adopts a flange shape that excels in versatility during embedding. This is a new type of ultrasonic motor that contributes to the thinning of robot joints and devices.

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High Torque Ultrasonic Motor: PSM60 W Series

Maintains a high torque of 2.0 [N/m], the world's lightest and thinnest motor in its class.

It can maintain a high torque of 2.0 [N·m] without power or control signals, and without brakes or clutches, allowing for the maintenance of the posture and angle of robots and conveyor systems. There is no backlash when stationary, and it is the world's lightest and thinnest motor in its class. It achieves high torque without modification, using the same interface as the PSM60 series.

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NM_【Adopted by domestic semiconductor manufacturing companies】 Vacuum-compatible ultrasonic motor

[Adopted by domestic semiconductor manufacturers] An ultrasonic motor used in semiconductor manufacturing that combines high-speed movement and precise positioning in a vacuum.

Nanomotion's ultrasonic motors come in various sizes and are suitable for environments ranging from atmospheric pressure to ultra-high vacuum. We have built motion platforms for a wide range of applications, from various micro-stages in the semiconductor industry to 300mm wafer inspection stages. The features of Nanomotion's ultrasonic motors include backlash-free direct drive, allowing the stage to be held even without power. The motor alone can provide a driving force of up to 32N, but in situations where more torque is needed, multiple ultrasonic motors can be installed to increase the driving force. They can also be used in high vacuum environments, and a non-magnetic model is available for ion beam applications. ■ SE Motor (Latest Model) Speed range of 1μm to 500mm/sec, sub-nanometer step resolution, maximum driving force of 32N. This ultrasonic motor was developed with Nanomotion's involvement in a development consortium for 7nm processes and has garnered attention from domestic manufacturers. ■ HR Motor (Standard Model) Speed range of 1μm to 250mm/sec, 1nm step resolution, maximum driving force of 32N. This ultrasonic motor is widely used by domestic manufacturers.

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Ultrasonic motor

Achieves stable rotation performance, strong holding power, and high quietness!

Ultrasonic motors utilize the deformation of piezoelectric ceramics when a voltage is applied to them to achieve rotation. They are named "ultrasonic" motors because the frequency of that voltage exceeds the audible range for humans (below 20 kHz). Since then, the USR series of ultrasonic motors developed by Shinsei Industry has undergone continuous improvements aimed at enhancing functionality and reliability. The culmination of this technology is represented by the USR30 series with a diameter of 30 mm and the USR60 series with a diameter of 60 mm. As a result of these efforts, the USR series has been adopted by many companies and academic institutions around the world, earning a high reputation as the de facto standard for ultrasonic motors. Currently, both the USR30 series and USR60 series are manufactured and sold as standard motors intended for use in general environments, as well as non-magnetic motors designed for use in high magnetic field environments. For more details, please download and view the catalog.

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Ultrasonic Motor Standard Type Basic Model USR30-S Series

Highly robust, capable of cable connection and disconnection via connectors.

The standard model is ideal for prototyping devices using ultrasonic motors and building systems for general environments. The ultrasonic motor standard basic model, USR30-S series, is housed in a case, providing high durability, and allows for cable connection and disconnection via connectors. The maximum torque is 0.1 [Nm], and the maximum rotational speed is 300 [rpm]. We offer the single-shaft type USR30-S3, which has only an output shaft, and the dual-shaft type USR30-S4, which allows for sensor installation. For more details, please download and view the catalog.

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Ultrasonic Motor Standard Type Encoder-equipped Model USR30-E Series

Model equipped with an incremental rotary encoder.

The standard model is ideal for prototyping devices using ultrasonic motors and building systems for general environments. The USR30-E series is equipped with an incremental rotary encoder. The maximum torque is 0.1 [Nm], and the maximum rotation speed is 300 [rpm]. The encoder resolution can be selected from two options: 500 [P/R] and 1,000 [P/R]. The USR30-E3 features a 500 [P/R] encoder, while the USR30-E3T is equipped with a 1,000 [P/R] encoder. For more details, please download and view the catalog.

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Ultrasonic Motor Standard Type Basic Model USR60-S Series

High durability with the ability to connect and disconnect cables via connectors.

The standard model is ideal for prototyping devices using ultrasonic motors and building systems for general environments. The USR60-S series is a standard model that is housed in a robust case and allows for cable connection and disconnection via connectors. The maximum torque is 1.0[Nm] and the maximum rotational speed is 150[rpm]. We offer the single-shaft type USR60-S3, which has an output shaft only, and the dual-shaft type USR60-S4, which allows for sensor installation. For more details, please download and view the catalog.

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Ultrasonic Motor Non-Magnetic Type Basic Model USR60-SN Series

Highly robust, allowing for cable connection and disconnection via connectors!

The non-magnetic ultrasonic motor is designed for use in high magnetic fields such as MRI, with metal components made only from special aluminum and copper alloys. It can be safely used in environments with a magnetic flux density exceeding 3[T]. The USR60-SN series is housed in a robust case and features a non-magnetic model that allows for cable connection and disconnection via a connector. The maximum torque is 1.0[Nm], and the maximum rotational speed is 150[rpm]. We offer a single-shaft type USR60-S3N with an output shaft only, and a dual-shaft type USR60-S4N that allows for sensor mounting. For more details, please download and view the catalog.

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